DS DS/EN 62374-1/AC
DS DSEN 62374-1AC 2011-JUN-13 Semconductor devces - Part 1 Tme-dependent delectrc breakdown TDDB test for nter-metal layers
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IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.